CrossRef enabled

PAC Archives

Archive →

Pure Appl. Chem., 1994, Vol. 66, No. 6, pp. 1381-1388

http://dx.doi.org/10.1351/pac199466061381

Real-time monitoring of surface chemistry during plasma processing

E. S. Aydil, R. A. Gottscho and Y. J. Chabal

First page:
First page image